
Overview
Tantalum Ethoxide, chemically represented as Ta(OC₂H₅)₅, is an organometallic compound used in high-tech applications. It is a key precursor in thin-film deposition and material science research.
Chemical and Physical Properties
Molecular Information
– Formula: Ta(OC₂H₅)₅
– Molecular Weight: 364.27 g/mol
– Physical State: Liquid
– Color: Colorless to pale yellow
– Solubility: Soluble in organic solvents like ethanol and toluene
Reactivity and Stability
– Reacts with moisture to form tantalum oxides
– Thermally unstable, requiring controlled storage
– Can decompose at high temperatures
Key Applications
Semiconductor and Electronics Industry
Tantalum Ethoxide is widely utilized in Chemical Vapor Deposition (CVD) and Atomic Layer Deposition (ALD) processes to form tantalum oxide films, which are essential for:
– High-dielectric constant capacitors
– Insulating layers in microelectronics
– Protective coatings in integrated circuits
Optical and Coating Applications
As a precursor for tantalum pentoxide (Ta₂O₅), Tantalum Ethoxide contributes to the production of:
– High-refractive-index optical coatings
– Anti-reflective coatings for lenses and sensors
– Waveguides in photonics and telecommunications
Catalysis and Material Synthesis
Tantalum Ethoxide serves as a catalyst in various polymerization and organic synthesis reactions, making it useful in material engineering and industrial chemistry.
Safety and Handling
Potential Hazards
– Moisture Sensitivity: Reacts with water, forming ethanol and tantalum oxides
– Flammability: Organic alkoxides can be flammable under certain conditions
– Health Effects: Can cause skin and eye irritation; inhalation may lead to respiratory issues
Storage and Precautionary Measures
– Store in a sealed, moisture-free environment
– Handle under an inert gas atmosphere (e.g., nitrogen or argon)
– Use appropriate PPE, including gloves and goggles
– Work in a well-ventilated area or fume hood
Conclusion
Tantalum Ethoxide (CAS: 6074-84-6) is an essential precursor in advanced material applications, including semiconductor fabrication, optical coatings, and catalysis. While highly reactive, proper handling and safety measures ensure its effective use in industrial and research settings. Future advancements may unlock additional applications for this versatile compound.